Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158526 | Temperature controlled substrate support assembly | Vijay D. Parkhe, Masanori Ono, Zhiqiang Guo | 2021-10-26 |
| 11088005 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Jason C. Della Rosa, Hamid Noobakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2021-08-10 |