Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158526 | Temperature controlled substrate support assembly | Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo | 2021-10-26 |
MO
Masanori Ono
Overall (2021): #344,497 of 548,734Top 65%
1
Patents 2021