Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11088005 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Jason C. Della Rosa, Hamid Noobakhsh, Douglas A. Buchberger, Jr. | 2021-08-10 |
| 10928145 | Dual zone common catch heat exchanger/chiller | Fernando Silveira | 2021-02-23 |