Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069511 | System and methods using an inline surface engineering source | Christopher R. Hatem, Peter F. Kurunczi, Joseph C. Olson, Anthony Renau | 2021-07-20 |
| 10904996 | Substrate support with electrically floating power supply | Travis Koh, Haitao Wang, Philip Allan Kraus, Vijay D. Parkhe, Daniel Distaso +2 more | 2021-01-26 |