Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195703 | Apparatus and techniques for angled etching using multielectrode extraction source | Morgan Evans, Joseph C. Olson | 2021-12-07 |
| 11069511 | System and methods using an inline surface engineering source | Christopher R. Hatem, Christopher A. Rowland, Joseph C. Olson, Anthony Renau | 2021-07-20 |
| 11037758 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Ryan Downey, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2021-06-15 |