Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127557 | Ion source with single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel +6 more | 2021-09-21 |
| 11037758 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Alexandre Likhanskii +1 more | 2021-06-15 |