Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127557 | Ion source with single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Svetlana B. Radovanov, Alexander S. Perel, Graham Wright +6 more | 2021-09-21 |
| 11037758 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer +1 more | 2021-06-15 |
| 11011343 | High-current ion implanter and method for controlling ion beam using high-current ion implanter | Shengwu Chang, Frank Sinclair, Antonella Cucchetti, Eric D. Hermanson, Christopher Campbell | 2021-05-18 |
| 10937624 | Apparatus and method for controlling ion beam using electrostatic filter | Frank Sinclair, Shengwu Chang | 2021-03-02 |
| 10923306 | Ion source with biased extraction plate | Svetlana B. Radovanov, Bon-Woong Koo | 2021-02-16 |
| 10886098 | Electrostatic filter and ion implanter having asymmetric electrostatic configuration | Frank Sinclair, Shengwu Chang, Eric D. Hermanson, Nevin H. Clay | 2021-01-05 |