Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114277 | Dual cathode ion source | Bon-Woong Koo, Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro +2 more | 2021-09-07 |
| 11049691 | Ion beam quality control using a movable mass resolving device | Bon-Woong Koo, Robert C. Lindberg, Eric D. Hermanson, Frank Sinclair, Randy Martin +3 more | 2021-06-29 |
| 11011343 | High-current ion implanter and method for controlling ion beam using high-current ion implanter | Alexandre Likhanskii, Shengwu Chang, Frank Sinclair, Eric D. Hermanson, Christopher Campbell | 2021-05-18 |