Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201057 | Techniques and apparatus for anisotropic stress compensation in substrates using ion implantation | Scott Falk, Qintao Zhang | 2021-12-14 |
| 11114277 | Dual cathode ion source | Bon-Woong Koo, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro, Michael D. Johnson +2 more | 2021-09-07 |