Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127557 | Ion source with single-slot tubular cathode | Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel, Graham Wright +6 more | 2021-09-21 |
| 11114277 | Dual cathode ion source | Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro, Michael D. Johnson +2 more | 2021-09-07 |
| 11049691 | Ion beam quality control using a movable mass resolving device | Robert C. Lindberg, Eric D. Hermanson, Frank Sinclair, Antonella Cucchetti, Randy Martin +3 more | 2021-06-29 |
| 10923306 | Ion source with biased extraction plate | Svetlana B. Radovanov, Alexandre Likhanskii | 2021-02-16 |
| 10923309 | GeH4/Ar plasma chemistry for ion implant productivity enhancement | Ajdin Sarajlic, Ronald F. Johnson, Nunzio V. Carbone, Peter Ewing, Mervyn Deegan | 2021-02-16 |