Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170973 | Temperature control for insertable target holder for solid dopant materials | Shreyansh Patel, Daniel Alvarado, Daniel R. Tieger, Brian S. Gori, William R. Bogiages, Jr. +2 more | 2021-11-09 |
| 11127557 | Ion source with single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel +6 more | 2021-09-21 |
| 11008649 | Advanced sputter targets for ion generation | Klaus Becker | 2021-05-18 |
| 10957509 | Insertable target holder for improved stability and performance for solid dopant materials | Daniel Alvarado, Shreyansh Patel, Daniel R. Tieger | 2021-03-23 |