Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11008649 | Advanced sputter targets for ion generation | Graham Wright | 2021-05-18 |
| 10896799 | Ion source with multiple configurations | Carlos M. Goulart, Daniel Alvarado, Daniel R. Tieger, Alexander S. Perel | 2021-01-19 |