Temperature control for insertable target holder for solid dopant materials

Assignee

• Applied Materials

Inventors

• Shreyansh Patel (12 patents)
• Graham Wright (29 patents)
• Daniel Alvarado (31 patents)
• Daniel R. Tieger (25 patents)
• Brian S. Gori (3 patents)
• William R. Bogiages, Jr. (4 patents)
• Benjamin Oswald (3 patents)
• Craig R. Chaney (45 patents)

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