Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10923309 | GeH4/Ar plasma chemistry for ion implant productivity enhancement | Bon-Woong Koo, Ajdin Sarajlic, Ronald F. Johnson, Nunzio V. Carbone, Peter Ewing | 2021-02-16 | $36,444,000 |