Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201057 | Techniques and apparatus for anisotropic stress compensation in substrates using ion implantation | Jun Lu, Qintao Zhang | 2021-12-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201057 | Techniques and apparatus for anisotropic stress compensation in substrates using ion implantation | Jun Lu, Qintao Zhang | 2021-12-14 |