Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11120966 | System and method for improved beam current from an ion source | Frank Sinclair, Michael St. Peter | 2021-09-14 |
| 11011343 | High-current ion implanter and method for controlling ion beam using high-current ion implanter | Alexandre Likhanskii, Frank Sinclair, Antonella Cucchetti, Eric D. Hermanson, Christopher Campbell | 2021-05-18 |
| 10937624 | Apparatus and method for controlling ion beam using electrostatic filter | Alexandre Likhanskii, Frank Sinclair | 2021-03-02 |
| 10886098 | Electrostatic filter and ion implanter having asymmetric electrostatic configuration | Alexandre Likhanskii, Frank Sinclair, Eric D. Hermanson, Nevin H. Clay | 2021-01-05 |