Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11120966 | System and method for improved beam current from an ion source | Shengwu Chang, Frank Sinclair | 2021-09-14 | $84,054,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11120966 | System and method for improved beam current from an ion source | Shengwu Chang, Frank Sinclair | 2021-09-14 | $84,054,000 |