Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886098 | Electrostatic filter and ion implanter having asymmetric electrostatic configuration | Alexandre Likhanskii, Frank Sinclair, Shengwu Chang, Eric D. Hermanson | 2021-01-05 |