Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189460 | System, apparatus and method for variable length electrode in linear accelerator | Charles T. Carlson, Paul J. Murphy, Frank Sinclair | 2021-11-30 |
| 11037758 | In-situ plasma cleaning of process chamber components | Kevin Anglin, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2021-06-15 |