Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127593 | Techniques and apparatus for elongation patterning using angled ion beams | Simon Ruffell | 2021-09-21 |
| 11053580 | Techniques for selective deposition using angled ions | Maureen Petterson | 2021-07-06 |
| 11037758 | In-situ plasma cleaning of process chamber components | William Davis Lee, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2021-06-15 |