Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127593 | Techniques and apparatus for elongation patterning using angled ion beams | Kevin Anglin | 2021-09-21 |
| 11043380 | Techniques to engineer nanoscale patterned features using ions | John Hautala, Adam Brand, Huixiong Dai | 2021-06-22 |
| 10971368 | Techniques for processing substrates using directional reactive ion etching | Steven R. Sherman, John Hautala, Adam Brand | 2021-04-06 |