Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043380 | Techniques to engineer nanoscale patterned features using ions | Simon Ruffell, Adam Brand, Huixiong Dai | 2021-06-22 |
| 11043394 | Techniques and apparatus for selective shaping of mask features using angled beams | — | 2021-06-22 |
| 10990014 | Performance improvement of EUV photoresist by ion implantation | Tristan Y. Ma, Huixiong Dai, Anthony Renau, Joseph C. Olson | 2021-04-27 |
| 10971368 | Techniques for processing substrates using directional reactive ion etching | Steven R. Sherman, Simon Ruffell, Adam Brand | 2021-04-06 |
| 10886279 | Device structure for forming semiconductor device having angled contacts | Sony Varghese, Anthony Renau, Morgan Evans, Joe Olson | 2021-01-05 |