Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043380 | Techniques to engineer nanoscale patterned features using ions | Simon Ruffell, John Hautala, Huixiong Dai | 2021-06-22 |
| 10971368 | Techniques for processing substrates using directional reactive ion etching | Steven R. Sherman, Simon Ruffell, John Hautala | 2021-04-06 |