Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043380 | Techniques to engineer nanoscale patterned features using ions | Simon Ruffell, John Hautala, Adam Brand | 2021-06-22 |
| 10990014 | Performance improvement of EUV photoresist by ion implantation | Tristan Y. Ma, Anthony Renau, John Hautala, Joseph C. Olson | 2021-04-27 |
| 10957590 | Method for forming a layer | Wenhui Wang, Christopher S. Ngai, Liqi Wu, Wenyu Zhang, Yongmei Chen +3 more | 2021-03-23 |
| 10927450 | Methods and apparatus for patterning substrates using asymmetric physical vapor deposition | Bencherki Mebarki, Wenhui Wang, Christopher S. Ngai, Joung Joo Lee, Xianmin Tang | 2021-02-23 |
| 10930556 | Contact over active gate structure | Wenhui Wang, Christopher S. Ngai | 2021-02-23 |
| 10927451 | Methods and apparatus for patterning substrates using asymmetric physical vapor deposition | Bencherki Mebarki, Byeong-Chan Lee, Tejinder Singh, Joung Joo Lee, Xianmin Tang | 2021-02-23 |
| 10930555 | Contact over active gate structure | Wenhui Wang, Christopher S. Ngai | 2021-02-23 |