Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069511 | System and methods using an inline surface engineering source | Christopher R. Hatem, Peter F. Kurunczi, Christopher A. Rowland, Joseph C. Olson | 2021-07-20 |
| 10990014 | Performance improvement of EUV photoresist by ion implantation | Tristan Y. Ma, Huixiong Dai, John Hautala, Joseph C. Olson | 2021-04-27 |
| 10930735 | Gate all around device and method of formation using angled ions | Min Gyu Sung, Sony Varghese, Morgan Evans, Joseph C. Olson | 2021-02-23 |
| 10903211 | Gate devices and methods of formation using angled ions | Min Gyu Sung, Sony Varghese, Morgan Evans, Naushad K. Variam, Tassie Andersen | 2021-01-26 |
| 10886279 | Device structure for forming semiconductor device having angled contacts | Sony Varghese, Morgan Evans, John Hautala, Joe Olson | 2021-01-05 |