Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10990014 | Performance improvement of EUV photoresist by ion implantation | Huixiong Dai, Anthony Renau, John Hautala, Joseph C. Olson | 2021-04-27 |
| 10937663 | Selective photoresist etching for bridge defect removal | Juiyuan Hsu | 2021-03-02 |