Issued Patents 2021
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11205978 | Handling and processing double-sided devices on fragile substrates | Wayne MCMILLAN, Visweswaren Sivaramakrishnan, Ludovic Godet, Rutger Meyer Timmerman Thijssen, Naamah ARGAMAN | 2021-12-21 |
| 11195703 | Apparatus and techniques for angled etching using multielectrode extraction source | Peter F. Kurunczi, Morgan Evans | 2021-12-07 |
| 11193198 | Methods of forming devices on a substrate | Ludovic Godet, Rutger Meyer Timmerman Thijssen, Morgan Evans, Jinxin FU | 2021-12-07 |
| 11119405 | Techniques for forming angled structures | Morgan Evans, Rutger Meyer Timmerman Thijssen | 2021-09-14 |
| 11069511 | System and methods using an inline surface engineering source | Christopher R. Hatem, Peter F. Kurunczi, Christopher A. Rowland, Anthony Renau | 2021-07-20 |
| 11016228 | System and method for forming diffracted optical element having varied gratings | Morgan Evans, Rutger Meyer Timmerman Thijssen, Peter Kurunczi, Robert Masci | 2021-05-25 |
| 10990014 | Performance improvement of EUV photoresist by ion implantation | Tristan Y. Ma, Huixiong Dai, Anthony Renau, John Hautala | 2021-04-27 |
| 10935799 | Optical component having depth modulated angled gratings and method of formation | Rutger Meyer Timmerman Thijssen, Ludovic Godet, Morgan Evans | 2021-03-02 |
| 10930735 | Gate all around device and method of formation using angled ions | Min Gyu Sung, Sony Varghese, Anthony Renau, Morgan Evans | 2021-02-23 |