Issued Patents 2021
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11205978 | Handling and processing double-sided devices on fragile substrates | Wayne MCMILLAN, Visweswaren Sivaramakrishnan, Joseph C. Olson, Rutger Meyer Timmerman Thijssen, Naamah ARGAMAN | 2021-12-21 |
| 11193198 | Methods of forming devices on a substrate | Joseph C. Olson, Rutger Meyer Timmerman Thijssen, Morgan Evans, Jinxin FU | 2021-12-07 |
| 11187836 | Method of building a 3D functional optical material layer stacking structure | Michael Y. Young, Robert Jan Visser, Naamah ARGAMAN, Christopher Dennis Bencher, Wayne MCMILLAN | 2021-11-30 |
| 11171010 | Controlled hardmask shaping to create tapered slanted fins | Rutger Meyer Timmerman Thijssen | 2021-11-09 |
| 11111176 | Methods and apparatus of processing transparent substrates | Yongan Xu, Chien-An Chen | 2021-09-07 |
| 11112697 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Srinivas D. Nemani, Daniel J. Woodruff +2 more | 2021-09-07 |
| 11112694 | Methods of forming variable-depth device structures | Andre P. Labonte, Rutger Meyer Timmerman Thijssen | 2021-09-07 |
| 11066747 | Chemical delivery chamber for self-assembled monolayer processes | Qiwei Liang, Adib Khan, Tobin Kaufman-Osborn, Srinivas D. Nemani | 2021-07-20 |
| 11043437 | Transparent substrate with light blocking edge exclusion zone | Michael Y. Young, Robert Jan Visser | 2021-06-22 |
| 11029206 | Methods and apparatus for waveguide metrology | Jinxin FU, Rutger Meyer Timmerman Thijssen | 2021-06-08 |
| 10955606 | Method of imprinting tilt angle light gratings | Michael Y. Young, Robert Jan Visser, Wayne MCMILLAN | 2021-03-23 |
| 10954594 | High temperature vapor delivery system and method | Viachslav Babayan, Qiwei Liang, Tobin Kaufman-Osborn, Srinivas D. Nemani | 2021-03-23 |
| 10943779 | Method and system for three-dimensional (3D) structure fill | Ellie Yieh, Srinivas D. Nemani, Er-Xuan Ping, Gary E. Dickerson | 2021-03-09 |
| 10935799 | Optical component having depth modulated angled gratings and method of formation | Rutger Meyer Timmerman Thijssen, Morgan Evans, Joseph C. Olson | 2021-03-02 |
| 10927449 | Extension of PVD chamber with multiple reaction gases, high bias power, and high power impulse source for deposition, implantation, and treatment | Jingjing Liu, Srinivas D. Nemani, Yongmei Chen, Anantha K. Subramani | 2021-02-23 |
| 10930472 | Methods for forming a metal silicide interconnection nanowire structure | Bencherki Mebarki, Annamalai Lakshmanan, Kaushal K. Singh, Andrew Cockburn, Paul F. Ma +1 more | 2021-02-23 |
| 10921721 | Measurement system and grating pattern array | Jinxin FU, Yifei Wang, Yongan Xu | 2021-02-16 |