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Handling and processing double-sided devices on fragile substrates |
Wayne MCMILLAN, Visweswaren Sivaramakrishnan, Joseph C. Olson, Rutger Meyer Timmerman Thijssen, Naamah ARGAMAN |
2021-12-21 |
| 11193198 |
Methods of forming devices on a substrate |
Joseph C. Olson, Rutger Meyer Timmerman Thijssen, Morgan Evans, Jinxin FU |
2021-12-07 |
| 11187836 |
Method of building a 3D functional optical material layer stacking structure |
Michael Y. Young, Robert Jan Visser, Naamah ARGAMAN, Christopher Dennis Bencher, Wayne MCMILLAN |
2021-11-30 |
| 11171010 |
Controlled hardmask shaping to create tapered slanted fins |
Rutger Meyer Timmerman Thijssen |
2021-11-09 |
| 11111176 |
Methods and apparatus of processing transparent substrates |
Yongan Xu, Chien-An Chen |
2021-09-07 |
| 11112697 |
Method and apparatus for post exposure processing of photoresist wafers |
Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Srinivas D. Nemani, Daniel J. Woodruff +2 more |
2021-09-07 |
| 11112694 |
Methods of forming variable-depth device structures |
Andre P. Labonte, Rutger Meyer Timmerman Thijssen |
2021-09-07 |
| 11066747 |
Chemical delivery chamber for self-assembled monolayer processes |
Qiwei Liang, Adib Khan, Tobin Kaufman-Osborn, Srinivas D. Nemani |
2021-07-20 |
| 11043437 |
Transparent substrate with light blocking edge exclusion zone |
Michael Y. Young, Robert Jan Visser |
2021-06-22 |
| 11029206 |
Methods and apparatus for waveguide metrology |
Jinxin FU, Rutger Meyer Timmerman Thijssen |
2021-06-08 |
| 10955606 |
Method of imprinting tilt angle light gratings |
Michael Y. Young, Robert Jan Visser, Wayne MCMILLAN |
2021-03-23 |
| 10954594 |
High temperature vapor delivery system and method |
Viachslav Babayan, Qiwei Liang, Tobin Kaufman-Osborn, Srinivas D. Nemani |
2021-03-23 |
| 10943779 |
Method and system for three-dimensional (3D) structure fill |
Ellie Yieh, Srinivas D. Nemani, Er-Xuan Ping, Gary E. Dickerson |
2021-03-09 |
| 10935799 |
Optical component having depth modulated angled gratings and method of formation |
Rutger Meyer Timmerman Thijssen, Morgan Evans, Joseph C. Olson |
2021-03-02 |
| 10927449 |
Extension of PVD chamber with multiple reaction gases, high bias power, and high power impulse source for deposition, implantation, and treatment |
Jingjing Liu, Srinivas D. Nemani, Yongmei Chen, Anantha K. Subramani |
2021-02-23 |
| 10930472 |
Methods for forming a metal silicide interconnection nanowire structure |
Bencherki Mebarki, Annamalai Lakshmanan, Kaushal K. Singh, Andrew Cockburn, Paul F. Ma +1 more |
2021-02-23 |
| 10921721 |
Measurement system and grating pattern array |
Jinxin FU, Yifei Wang, Yongan Xu |
2021-02-16 |