Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11066747 | Chemical delivery chamber for self-assembled monolayer processes | Qiwei Liang, Adib Khan, Srinivas D. Nemani, Ludovic Godet | 2021-07-20 |
| D924825 | Chamber inlet | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra +1 more | 2021-07-13 |
| 10954594 | High temperature vapor delivery system and method | Viachslav Babayan, Qiwei Liang, Ludovic Godet, Srinivas D. Nemani | 2021-03-23 |
| 10947621 | Low vapor pressure chemical delivery | Adib Khan, Qiwei Liang, Srinivas D. Nemani | 2021-03-16 |