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Method and apparatus for post exposure processing of photoresist wafers |
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Gas abatement apparatus |
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Method and apparatus for thin wafer carrier |
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| 11066747 |
Chemical delivery chamber for self-assembled monolayer processes |
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| 10954594 |
High temperature vapor delivery system and method |
Viachslav Babayan, Tobin Kaufman-Osborn, Ludovic Godet, Srinivas D. Nemani |
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| 10947621 |
Low vapor pressure chemical delivery |
Adib Khan, Srinivas D. Nemani, Tobin Kaufman-Osborn |
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| 10896325 |
Blending of agricultural products via hyperspectral imaging and analysis |
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2021-01-19 |
