Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112697 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Ludovic Godet, Srinivas D. Nemani, Daniel J. Woodruff +2 more | 2021-09-07 |
| 11110383 | Gas abatement apparatus | Adib Khan, Sultan Malik, Srinivas D. Nemani, Rafika Smati, Joseph Ng +1 more | 2021-09-07 |
| 11094573 | Method and apparatus for thin wafer carrier | Jingyu Qiao, Viachslav Babayan, Seshadri Ramaswami, Srinivas D. Nemani | 2021-08-17 |
| 11066747 | Chemical delivery chamber for self-assembled monolayer processes | Adib Khan, Tobin Kaufman-Osborn, Srinivas D. Nemani, Ludovic Godet | 2021-07-20 |
| 10954594 | High temperature vapor delivery system and method | Viachslav Babayan, Tobin Kaufman-Osborn, Ludovic Godet, Srinivas D. Nemani | 2021-03-23 |
| 10947621 | Low vapor pressure chemical delivery | Adib Khan, Srinivas D. Nemani, Tobin Kaufman-Osborn | 2021-03-16 |
| 10896325 | Blending of agricultural products via hyperspectral imaging and analysis | Seetharama C. Deevi, Henry M. Dante, Samuel Timothy Henry | 2021-01-19 |