Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11110383 | Gas abatement apparatus | Qiwei Liang, Sultan Malik, Srinivas D. Nemani, Rafika Smati, Joseph Ng +1 more | 2021-09-07 |
| 11066747 | Chemical delivery chamber for self-assembled monolayer processes | Qiwei Liang, Tobin Kaufman-Osborn, Srinivas D. Nemani, Ludovic Godet | 2021-07-20 |
| 10947621 | Low vapor pressure chemical delivery | Qiwei Liang, Srinivas D. Nemani, Tobin Kaufman-Osborn | 2021-03-16 |