Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10930472 | Methods for forming a metal silicide interconnection nanowire structure | Bencherki Mebarki, Kaushal K. Singh, Andrew Cockburn, Ludovic Godet, Paul F. Ma +1 more | 2021-02-23 |
| 10910263 | Doping control of metal nitride films | Ben-Li Sheu, Guodan Wei, Nicole Lundy, Paul F. Ma | 2021-02-02 |