Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910263 | Doping control of metal nitride films | Annamalai Lakshmanan, Guodan Wei, Nicole Lundy, Paul F. Ma | 2021-02-02 |
| 10892186 | Integration of ALD copper with high temperature PVD copper deposition for BEOL interconnect | Feng Q. Liu, Tae Hong Ha, Mei Chang, Shirish A. PETHE | 2021-01-12 |