Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982326 | Counter-flow multi inject for atomic layer deposition chamber | Dien-Yeh Wu, Paul F. Ma, Chun-Teh Kao | 2021-04-20 |
| 10910263 | Doping control of metal nitride films | Annamalai Lakshmanan, Ben-Li Sheu, Nicole Lundy, Paul F. Ma | 2021-02-02 |