Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982326 | Counter-flow multi inject for atomic layer deposition chamber | Dien-Yeh Wu, Paul F. Ma, Guodan Wei | 2021-04-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982326 | Counter-flow multi inject for atomic layer deposition chamber | Dien-Yeh Wu, Paul F. Ma, Guodan Wei | 2021-04-20 |