Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11193198 | Methods of forming devices on a substrate | Joseph C. Olson, Ludovic Godet, Rutger Meyer Timmerman Thijssen, Morgan Evans | 2021-12-07 |
| 11029206 | Methods and apparatus for waveguide metrology | Rutger Meyer Timmerman Thijssen, Ludovic Godet | 2021-06-08 |
| 11008647 | PVD titanium dioxide formation using sputter etch to halt onset of crystalinity in thick films | Karl J. Armstrong | 2021-05-18 |
| 10921721 | Measurement system and grating pattern array | Yifei Wang, Yongan Xu, Ludovic Godet | 2021-02-16 |