Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189710 | Method of forming a bottom isolation dielectric by directional sputtering of a capping layer over a pair of stacks | Tejinder Singh, Bencherki Mebarki | 2021-11-30 |
| 10969129 | Apparatus and method for controlling air conditioner in air conditioning system | Kyung-Jae KIM, Kwan-Woo SONG, Woon-Sik Lee, Je Hyeon Lee, Hye-jung Cho +3 more | 2021-04-06 |
| 10927451 | Methods and apparatus for patterning substrates using asymmetric physical vapor deposition | Bencherki Mebarki, Huixiong Dai, Tejinder Singh, Joung Joo Lee, Xianmin Tang | 2021-02-23 |