Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10904996 | Substrate support with electrically floating power supply | Travis Koh, Haitao Wang, Philip Allan Kraus, Vijay D. Parkhe, Christopher A. Rowland +2 more | 2021-01-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10904996 | Substrate support with electrically floating power supply | Travis Koh, Haitao Wang, Philip Allan Kraus, Vijay D. Parkhe, Christopher A. Rowland +2 more | 2021-01-26 |