Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11179965 | Electrostatic chuck optimized for refurbishment | Vijay D. Parkhe | 2021-11-23 |
| 11161218 | Window in thin polishing pad | Yongqi Hu, Thomas Lawrence Terry | 2021-11-02 |
| 11007619 | Carrier head membrane with regions of different roughness | Young J. Paik, Ashish Bhatnagar | 2021-05-18 |