Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195923 | Method of fabricating a semiconductor device having reduced contact resistance | Gaurav Thareja, Xuebin Li, Abhishek Dube, Yi-Chiau Huang, Andy Lo +3 more | 2021-12-07 |
| 11164737 | Integrated epitaxy and preclean system | Lara Hawrylchak, Schubert S. Chu, Errol C. Sanchez, Kin Pong Lo | 2021-11-02 |
| 11049719 | Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal | Lara Hawrylchak, Kin Pong Lo, Errol C. Sanchez, Schubert S. Chu | 2021-06-29 |