Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183382 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO | 2021-11-23 |
| 11158501 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | — | 2021-10-26 |
| 11152215 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Motomu DEGAI, Hiroshi Ashihara | 2021-10-19 |
| 11094532 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Tatsuru Matsuoka, Kenji Kameda, Satoshi Shimamoto | 2021-08-17 |