Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164741 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshitomo HASHIMOTO | 2021-11-02 |
| 11094532 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Kimihiko NAKATANI, Kenji Kameda, Satoshi Shimamoto | 2021-08-17 |
| 11056337 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshitomo HASHIMOTO | 2021-07-06 |
| 10910214 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Masanori NAKAYAMA, Masaya NAGATO, Hiroki Tamashita, Takafumi Nitta +1 more | 2021-02-02 |