Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094532 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Kimihiko NAKATANI, Tatsuru Matsuoka, Satoshi Shimamoto | 2021-08-17 |
| 11001923 | Method of manufacturing semiconductor device and recording medium | Noriyuki Isobe, Koichi Oikawa | 2021-05-11 |
| 10998647 | Harness with a wire terminal | Kazuomi Sato, Kenji Yamazaki, Hayato Nakamura | 2021-05-04 |
| 10968517 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shin SONE, Masaya NAGATO, Kotaro Konno | 2021-04-06 |