Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094532 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Kimihiko NAKATANI, Tatsuru Matsuoka, Kenji Kameda | 2021-08-17 |
| 10910214 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Masanori NAKAYAMA, Masaya NAGATO, Tatsuru Matsuoka, Hiroki Tamashita +1 more | 2021-02-02 |