Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189483 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Yuichiro TAKESHIMA, Katsunori FUNAKI, Yasutoshi TSUBOTA, Hiroto IGAWA | 2021-11-30 |
| 11155922 | Method of manufacturing semiconductor device, and recording medium | Teruo Yoshino, Takeshi Yasui, Masaki Murobayashi, Koichiro Harada, Tadashi Terasaki | 2021-10-26 |
| 11152476 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Yuichiro TAKESHIMA, Hiroto IGAWA, Katsunori FUNAKI | 2021-10-19 |
| 11145491 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masaki Murobayashi, Koichiro Harada, Hiroto IGAWA, Teruo Yoshino | 2021-10-12 |
| 11081362 | Method of manufacturing semiconductor device, and recording medium | Yuki YAMAKADO, Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA, Eiko TAKAMI +2 more | 2021-08-03 |
| 10910214 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Masaya NAGATO, Tatsuru Matsuoka, Hiroki Tamashita, Takafumi Nitta +1 more | 2021-02-02 |