Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155922 | Method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Masaki Murobayashi, Koichiro Harada, Tadashi Terasaki, Masanori NAKAYAMA | 2021-10-26 |
| 11145491 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masaki Murobayashi, Koichiro Harada, Hiroto IGAWA, Masanori NAKAYAMA | 2021-10-12 |
| 10934622 | Substrate processing apparatus | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2021-03-02 |
| 10938297 | AC-DC conversion device and method for controlling same by controlling the timing of multiple switch portions | Keisuke Hattori, Tomohisa Okami | 2021-03-02 |