Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11104995 | Substrate processing apparatus | Takashi Yahata, Satoshi Takano, Kazuyuki Toyoda, Naofumi Ohashi | 2021-08-31 |
| 10978310 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of adjusting substrate temperature | Tsukasa Kamakura, Mitsuro Tanabe, Naofumi Ohashi, Eisuke Nishitani, Shun MATSUI | 2021-04-13 |
| 10978361 | Substrate processing apparatus and recording medium | Takafumi Sasaki, Kazuhiro Morimitsu, Naofumi Ohashi, Shun MATSUI | 2021-04-13 |
| 10964531 | Method of manufacturing semiconductor device by supplying gas | Takashi Nakagawa, Yoshiro Hirose, Naofumi Ohashi | 2021-03-30 |
| 10934622 | Substrate processing apparatus | Teruo Yoshino, Naofumi Ohashi, Shun MATSUI | 2021-03-02 |
| 10930533 | Substrate processing apparatus, substrate processing system and method of manufacturing semiconductor device | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Shun MATSUI | 2021-02-23 |