Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10984991 | Substrate processing apparatus | Shun MATSUI | 2021-04-20 |
| 10930533 | Substrate processing apparatus, substrate processing system and method of manufacturing semiconductor device | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2021-02-23 |