Issued Patents 2021
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145505 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Takashi Yahata, Ryuji Yamamoto | 2021-10-12 |
| 11104995 | Substrate processing apparatus | Takashi Yahata, Satoshi Takano, Kazuyuki Toyoda, Tadashi Takasaki | 2021-08-31 |
| 11043377 | Method of manufacturing semiconductor device | Yoshiro Hirose | 2021-06-22 |
| 11037823 | Method of manufacturing semiconductor device | Tsuyoshi Takeda, Toshiyuki Kikuchi | 2021-06-15 |
| 11027970 | Method of manufacturing semiconductor device | Yoshiro Hirose | 2021-06-08 |
| 10978361 | Substrate processing apparatus and recording medium | Takafumi Sasaki, Kazuhiro Morimitsu, Tadashi Takasaki, Shun MATSUI | 2021-04-13 |
| 10978310 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of adjusting substrate temperature | Tsukasa Kamakura, Mitsuro Tanabe, Eisuke Nishitani, Tadashi Takasaki, Shun MATSUI | 2021-04-13 |
| 10964531 | Method of manufacturing semiconductor device by supplying gas | Takashi Nakagawa, Yoshiro Hirose, Tadashi Takasaki | 2021-03-30 |
| 10934622 | Substrate processing apparatus | Teruo Yoshino, Tadashi Takasaki, Shun MATSUI | 2021-03-02 |
| 10930533 | Substrate processing apparatus, substrate processing system and method of manufacturing semiconductor device | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Shun MATSUI | 2021-02-23 |
| 10883172 | Method of manufacturing lithography template | — | 2021-01-05 |