Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978361 | Substrate processing apparatus and recording medium | Takafumi Sasaki, Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2021-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978361 | Substrate processing apparatus and recording medium | Takafumi Sasaki, Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2021-04-13 |